Citation: | WU Cheng, LI Jun, HOU Tianyi, YU Ningbin, GAO Xiujuan. Effect of pad and slurry on fixed abrasive polishing of gallium oxide crystal[J]. Diamond & Abrasives Engineering, 2022, 42(6): 720-727. doi: 10.13394/j.cnki.jgszz.2022.0043 |
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