Study on crack initiation scratching depth of monocrystalline silicon

CHEN Zibin; GE Mengran; BI Wenbo; ZHANG Chenzheng; GE Peiqi

doi:10.13394/j.cnki.jgszz.2021.3.0008

Volume 41 Issue 3

Jun. 2021

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CHEN Zibin, GE Mengran, BI Wenbo, ZHANG Chenzheng, GE Peiqi. Study on crack initiation scratching depth of monocrystalline silicon[J]. Diamond & Abrasives Engineering, 2021, 41(3): 55-59. doi: 10.13394/j.cnki.jgszz.2021.3.0008

Citation:

CHEN Zibin, GE Mengran, BI Wenbo, ZHANG Chenzheng, GE Peiqi. Study on crack initiation scratching depth of monocrystalline silicon[J]. Diamond & Abrasives Engineering, 2021, 41(3): 55-59. doi: 10.13394/j.cnki.jgszz.2021.3.0008

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Study on crack initiation scratching depth of monocrystalline silicon

doi: 10.13394/j.cnki.jgszz.2021.3.0008

1. School of Mechanical Engineering, Shandong University, Jinan 250061, China;
2. School of Mechanical and Electronic Engineering, Shandong Jianzhu University, Jinan 250101, China;
3. Key Laboratory of High-Efficiency and Clean Mechanical Manufacture at Shandong University, Ministry of Education, Jinan 250061, China

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Rev Recd Date: 2021-05-10

Available Online: 2022-04-06

Abstract

Abstract

As a typical brittle material, the key to achieve the plastic domain processing of monocrystalline silicon is to make the cutting depth less than the crack initiation cutting depth. In this experiment, the fracture strength theory is used to establish a method to calculate the initiation scratching depth of radial crack, median crack and lateral crack for monocrystalline silicon scratching processing. The crack initiation scratching depth and scratch depth are calculated. The experimental device for high-speed scratching monocrystalline silicon with a Berkovich indenter is designed, and the scratch depth of the radial crack initiation is measured in the scratching experiment. The calculated values of the scratch depth at radial crack initiation are in good agreement with the experimental measurements.
- monocrystalline silicon,
- crack initiation,
- scratching depth,
- scratch depth