| Citation: | ZHANG Zili, JIN Zhuji, MU Qing, YANG Huipeng, HAN Xiaolong. Optimization of CMP solution for yttrium aluminum garnet crystal[J]. Diamond & Abrasives Engineering, 2021, 41(2): 82-88. doi: 10.13394/j.cnki.jgszz.2021.2.0014
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ZHANG Zili, JIN Zhuji, MU Qing, YANG Huipeng, HAN Xiaolong. Optimization of CMP solution for yttrium aluminum garnet crystal[J]. Diamond & Abrasives Engineering, 2021, 41(2): 82-88. doi: 10.13394/j.cnki.jgszz.2021.2.0014
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