Laser planarization efficiency and roughness of CVD diamond film

LI Shiyu; AN Kang; SHAO Siwu; HUANG Yabo; ZHANG Jianjun; ZHENG Yuting; CHEN Liangxian; WEI Junjun; LIU Jinlong; LI Chengming

doi:10.13394/j.cnki.jgszz.2021.0104

Volume 42 Issue 1

Mar. 2022

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Article Navigation > Diamond & Abrasives Engineering > 2022 > 42(1): 61-68

LI Shiyu, AN Kang, SHAO Siwu, HUANG Yabo, ZHANG Jianjun, ZHENG Yuting, CHEN Liangxian, WEI Junjun, LIU Jinlong, LI Chengming. Laser planarization efficiency and roughness of CVD diamond film[J]. Diamond & Abrasives Engineering, 2022, 42(1): 61-68. doi: 10.13394/j.cnki.jgszz.2021.0104

Citation:

LI Shiyu, AN Kang, SHAO Siwu, HUANG Yabo, ZHANG Jianjun, ZHENG Yuting, CHEN Liangxian, WEI Junjun, LIU Jinlong, LI Chengming. Laser planarization efficiency and roughness of CVD diamond film[J]. Diamond & Abrasives Engineering, 2022, 42(1): 61-68. doi: 10.13394/j.cnki.jgszz.2021.0104

Citation:

LI Shiyu, AN Kang, SHAO Siwu, HUANG Yabo, ZHANG Jianjun, ZHENG Yuting, CHEN Liangxian, WEI Junjun, LIU Jinlong, LI Chengming. Laser planarization efficiency and roughness of CVD diamond film[J]. Diamond & Abrasives Engineering, 2022, 42(1): 61-68. doi: 10.13394/j.cnki.jgszz.2021.0104

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Laser planarization efficiency and roughness of CVD diamond film

doi: 10.13394/j.cnki.jgszz.2021.0104

LI Shiyu¹,
AN Kang^{1, 2
,
,},
SHAO Siwu¹,
HUANG Yabo¹,
ZHANG Jianjun¹,
ZHENG Yuting^{1, 2},
CHEN Liangxian¹,
WEI Junjun^{1, 2},
LIU Jinlong^{1, 2},
LI Chengming^{1, 2
,
,}

1.
Institute for Advanced Materials and Technology, University of Science and Technology Beijing, Beijing 100083, China
2.
Shunde Graduate School, University of Science and Technology Beijing, Foshan 528399, Guangdong, China

More Information

Received Date: 2021-07-14
Accepted Date: 2021-10-13
Rev Recd Date: 2021-08-26

Available Online: 2022-03-17

Abstract

Abstract

The orthogonal experiment of laser planarization of CVD polycrystalline diamond film was carried out, and the morphology was analyzed by using scanning electron microscope (SEM). The surface roughness R_a, the surface roughness S_a and the taper of kerf were measured by confocal laser scanning microscope. The influence of laser parameters on cutting quality was analyzed. The results show that the factors affecting kerf taper are pulse width, pulse frequency, feed speed and laser current in turn, and the factors affecting line roughness are feed speed, laser current, pulse frequency and pulse width in turn. After optimization by orthogonal test, the best groove surface morphology can be obtained with laser current of 64 A, pulse width of 400 μs, pulse frequency of 275 Hz and feed speed of 100 mm/min. Using the optimized parameters, the surface roughness S_a was measured to be 11.7 μm. When the incident angle increased to 75°, the surface roughness S_a decreased to 1.9 μm, and the actual removal efficiency reached 1.1 mm³/min.
- CVD diamond film,
- laser planarization,
- surface roughness,
- mechanical grinding

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References(18)

References

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