Effect of lapping temperature on performance of hydrophilic fixed abrasive pad

The rise of lapping temperature causes a change in the modulus of the resin matrix, thereby affecting the processing performance of the hydrophilic fixed abrasive pad.The transient temperature field of hydrophilic fixed abrasive pad at different slurry temperatures was simulated by finite element analysis.The swelling rate and the amount of slurry wear were adopted to characterize the properties of the resin matrix for fixed abrasive pad.The processing performance of fixed abrasive pad for quartz glass at different lapping temperature was explored.The results show that with the rise of lapping temperature, the temperature distribution range of the resin matrix also changes, the swelling rate and the amount of slurry wear of the pad matrix reach 1.43% and 2.5 mg, respectively.Experimental results show that the increase in temperature causes the matrix modulus to decrease, the material removal rate and average surface roughness are improved, which are 8.2 μm/min and 69.9 nm, respectively.Appropriately increase of lapping temperature can improve the processing performance of the fixed abrasive pad to a certain extent.