A review on polishing technology of large area free-standing CVD diamond films

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基金项目:

Natural Science Foundation of Hebei Province (E2019302005).

Science and technology plan project of Hebei Academy of Sciences (No. 191408)

摘要: Recently, with the rapid development of chemical vapor deposition (CVD) technology, large area free-standing CVD diamond films have been produced successfully. However, the coarse grain size on the surface and the non-uniform thickness of unprocessed CVD diamond films make it difficult to meet the application requirement. The current study evaluates several existing polishing methods for CVD diamond films, including mechanical polishing, chemical mechanical polishing and tribochemical polishing technology.
- large area free-standing CVD diamond films /
- mechanical polishing /
- chemical mechanical polishing /
- tribochemical polishing technology