Abstract: Through the single factor experiment design of cutting SiC ceramics with diamond wire saw, the influences of technological parameters such as the linear speed, the feed speed and the ratio R of feed speed to linear speed on the surface quality of SiC ceramics were studied. The surface morphology and surface roughness were observed and measured by ultra depth of field three-dimensional microscope and precision roughness profiler. The results show that when the linear speed is increased from 0.4 m/s to 1.3 m/s, the surface morphology of SiC ceramics is obviously improved, and the surface roughness in the feed direction and in the wire saw direction is reduced by 20.35% and 10.45%, respectively. When the feed speed is increased from 6 μm/s to 24 μm/s, the surface morphology has changed from better to worse, and the surface roughness in the feed direction and in the wire saw direction is increased by 12.07% and 3.91%, respectively. When the feed speed and the linear speed are increased, while the ratio R of the two is fixed at 2×10^-5, the surface quality of SiC ceramics is basically maintained at the same level.