Effect of 1, 2, 4 -triazole and benzotriazole on chemical-mechanical polishing of 316L stainless steel
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摘要: 为探究1, 2, 4-三氮唑(TAZ)和苯并三氮唑(BTA)对316L不锈钢化学机械抛光(CMP)的影响及作用机理,在酸性条件下使用TAZ或BTA为缓蚀剂化学机械抛光316L不锈钢,用白光干涉仪观测316L不锈钢抛光后的表面质量,用红外光谱仪表征缓蚀剂的结构,用接触角测量仪检测抛光表面钝化膜的疏水性能,并用电化学工作站分析缓蚀剂的抑制效果和类型。结果表明:不锈钢材料去除率随TAZ或BTA含量的增大而减小。当TAZ浓度为3 mmol/L时,不锈钢表面粗糙度最低,为2.64 nm;BTA浓度为2 mmol/L时,不锈钢表面粗糙度最低,为2.53 nm。两者都含有含N官能团,都会增大316L不锈钢表面所生成钝化膜的疏水性并减小腐蚀电流密度,但使用TAZ时生产的保护膜更弱。且2种缓蚀剂均为阳极抑制型缓蚀剂。Abstract: Experiments of chemical mechanical polishing 316L stainless steel were conducted under acid condition, with 1, 2, 4-triazole (TAZ) or benzotriazole (BTA) as the corrosion inhibitor, to study the effect of TAZ and BTA and the mechanisms. The polished surfaces of 316L stainless steel were observed by using a white light interferometer. The structures of the inhibitors were characterized with an infrared spectrometer. The hydrophobic property of the passivation membrane on the surface was surveyed by measuring the contact angle.The effect and the type of inhibitor were analyzed by using an electrochemical workstation. The results show that the material removal rate of the steel decreases with the increase of the TAZ or BTA content. The minimum surface roughness of polished steel is 2.64 nm when adding 3mmol/L TAZ or 2.53 nm when adding 2 mmol/L BTA. It is found that both inhibitors contain N-functional groups, which will strengthen the hydrophobicity of the passivation membrane generated on the surface of 316L stainless steel and reduce the density of the corrosion current. However, the membrane generated when using TAZ is weaker. Both inhibitors are anodic-suppressed ones.
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