Design and function of cold trap in the process of preparing diamond films by DC arc plasma jet chemical vapor deposition
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摘要: 首先，介绍直流电弧等离子体喷射化学气相沉积法的原理以及气体循环系统的设计和其优缺点；其次，详细介绍冷阱系统的设计及其工作原理；最后，使用拉曼光谱和傅里叶变换红外光谱与光致发光光谱对比添加冷阱系统前后的金刚石薄膜的质量。结果表明：冷阱系统可以有效过滤循环气路中的热油气，避免杂质的掺入；在添加冷阱系统后，金刚石膜内掺入的杂质减少，金刚石拉曼峰半高宽降低到6.76 cm−1，接近于Ib型单晶金刚石的，且自支撑金刚石膜的晶体质量明显提高，光学透过率提升较大，在10.6 μm波长处达到68.4%。
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关键词:
- 直流电弧等离子体喷射化学气相沉积法 /
- 金刚石膜 /
- 循环系统 /
- 冷阱
Abstract: Firstly, this experiment introduces the principle of the DC arc jet method, the design of the gas circulation system and its advantages and disadvantages. Secondly, the design of the cold trap system and its working principle are introduced in detail. Finally, Raman spectroscopy and Fourier transform infrared spectroscopy are used to compare the quality of the diamond films prepared before and after adding the cold trap system. The results show that the cold trap system can effectively filter the oil vapor in the circulating gas lines and avoid the incorporation of impurities in diamond films. After adding the cold trap system, the impurity in the diamond wafer is reduced, and the half width of the diamond Raman peak is reduced to 6.76 cm−1, which is closed to Ib type single crystal diamond. In addition, the crystal quality and the optical transmittance of the free-standing diamond wafer is significantly improved, and the transmittance at the wavelength of 10.6 μm reaches 68.4%. -
图 4 接入循环气路中的冷阱冷却盘
Figure 4. Schematic diagram of cooling disk in circulating gas channel
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