Abstract: To study the performance of grinding aspheric SiC mirror with arc-shaped grinding wheel,the model of residual height of aspheric silicon carbide mirror is established based on the reciprocating grinding,and the prediction model of surface form accuracy is simulated and analyzed through the relationship between the residual height and the surface form accuracy.Resultsshow that the surface form accuracy decreases with the increase of cutting arc length and inclination angle,and that the accuracy is improved with the increase of base circle radius or arc radius of grinding wheel.The cutting circular arc length and base circle radius of grinding wheel have great influence on surface form accuracy.