Experimental study on Normal Force of cutting sapphire with multi-line swinging reciprocating saw
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摘要: 多线摇摆往复式线锯切割加工是目前将蓝宝石晶棒切割成晶圆衬底的主要加工方法,加工过程中法向切割力是反映加工过程稳定性的重要指标。本文测量了多线摇摆往复式线锯切割蓝宝石晶棒过程中产生的法向力 Fn ,跟踪了线网不同位置和不同切割深度法向力的变化规律,以法向力变化幅值Δ Fn 为指标,探究各种工艺参数对加工过程稳定性的影响。实验结果表明:法向力 Fn 与线锯的往复运动、工件的摇摆运动有明确的对应关系,线网前端的Δ Fn 与中后端有明显的不同。线速度、最大摇摆角度、单片耗线量、张紧力、总切割时间等工艺参数对Δ Fn 有着不同的影响。Δ Fn 的波动程度与线锯磨损有着密切的关系。
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关键词:
- 多线摇摆往复式线锯切割 /
- 蓝宝石 /
- 法向力
Abstract: Multi-line swinging reciprocating wire saw cutting is the main machining method to cut sapphire crystal bars into wafer substrate. The normal force is an important index to reflect the stability of the machining process. In this paper, the normal force Fn generated in the process of cutting sapphire crystal bars by a multi-wire swinging reciprocating wire saw was measured. The variation law of normal force at different positions and cutting depths was tracked. The variation amplitude of normal force Δ Fn was used as an indicator to investigate the influence of various process parameters on the stability of the machining process. The experimental results show that the Fn corresponds clearly with the reciprocating motion of the wire saw and the swinging motion of the workpiece, and the Δ Fn in the front of the wire net is different from the middle and the rear area. Process parameters such as the speed of the wire saw (Vs), maximum swing angle (θmax), single piece wire consumption (Md), tensioning force (Fw), and total cutting time (T) have different effects on Δ Fn . The fluctuation degree of Δ Fn is closely related to the wear of wire saw.
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